Parametric analysis of the inductively coupled plasma

Abstract

A systematic parametric study of an LTE (local thermodynamic equilibrium) mathematical model of pure inductively coupled argon plasma (ICAP) used for spectrochemical purposes was performed by means of computer simulations. The spatial distributions of temperature, gas velocity, magnetic field and energy losses were investigated under typical plasma operating conditions as function of the ICAP geometrical dimensions and dynamic parameters. These theoretical calculations can be used to predict the properties of the applied plasma in the course of practical work, to choose the optimal conditions by changing the operating parameters and to interpret existing analytical results. © Springer-Verlag 1996.