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Please use this identifier to cite or link to this item: https://dspace.ffh.bg.ac.rs/handle/123456789/1908
DC FieldValueLanguage
dc.contributor.authorGaković, B.en_US
dc.contributor.authorPongrac, I.en_US
dc.contributor.authorPetrović, Tamaraen_US
dc.contributor.authorMinić, Dragicaen_US
dc.contributor.authorTrtica, M.en_US
dc.date.accessioned2022-12-21T16:59:43Z-
dc.date.available2022-12-21T16:59:43Z-
dc.date.issued2006-01-01-
dc.identifier.isbn9780878494057-
dc.identifier.issn0255-5476en
dc.identifier.urihttps://dspace.ffh.bg.ac.rs/handle/123456789/1908-
dc.description.abstractIn this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd: YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1μm thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 108 and 109 W/cm2. Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.en
dc.relation.ispartofMaterials Science Forumen
dc.subjectNd:YAG laseren
dc.subjectOMen
dc.subjectSEMen
dc.subjectTEA CO laser 2en
dc.subjectTiN thin filmen
dc.titleNano-second surface modification of titanium nitride thin film by Nd:YAG and TEA CO<inf>2</inf> lasersen_US
dc.typeConference Paperen_US
dc.identifier.doi10.4028/www.scientific.net/MSF.518.161-
dc.identifier.scopus2-s2.0-34249665691-
dc.identifier.urlhttps://api.elsevier.com/content/abstract/scopus_id/34249665691-
dc.relation.firstpage161en
dc.relation.lastpage166en
dc.relation.volume518en
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextNo Fulltext-
item.cerifentitytypePublications-
item.openairetypeConference Paper-
item.grantfulltextnone-
crisitem.author.orcid0000-0001-5055-2039-
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University of Belgrade
Faculty of Physical Chemistry
Studentski trg 12-16
11158 Belgrade 118
PAC 105305
SERBIA
University of Belgrade Faculty of Physical Chemistry